Compact optical position feedback scheme for MOEMS mirrors |
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| Authors: | Andreas Tortschanoff M. Baumgart D. Holzmann M. Lenzhofer T. Sandner A. Kenda |
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| Affiliation: | 1. Carinthian Tech Research AG, Europastrasse 4/1, 9524, Villach, Austria
2. Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Str. 2, Dresden, 01109, Germany
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| Abstract: | Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations. |
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