| 硅尖的制备及应用 |
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| 引用本文： | 王艳华,马海阳,孙道恒.硅尖的制备及应用[J].微电子技术,2003,31(5):60-64. |
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| 作者姓名： | 王艳华 马海阳 孙道恒 |
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| 作者单位： | 厦门大学机电系2000研,厦门,361005 |
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| 摘 要： | 本文介绍了硅尖的制备及其在不同领域的应用。硅尖的制备方法可与现代IC工艺兼容且易削尖,故比其它材料微尖更实用。硅尖的应用随着制备工艺的改进与其它相关技术的进步必将得到新的开发。
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| 关 键 词： | 硅尖 刻蚀 微加工技术 |
| 文章编号： | 1008-0147(2003)05-60-05 |
| 修稿时间： | 2002年11月19 |
Fabrication of Silicon Tip and its Application |
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| WANG Yan-hua,MA Hai-yang,SUN Dao-heng.Fabrication of Silicon Tip and its Application[J].Microelectronic Technology,2003,31(5):60-64. |
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| Authors: | WANG Yan-hua MA Hai-yang SUN Dao-heng |
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| Abstract: | The fabrication of silicon tip and its application in different fields are introduced in the article. The method to fabricate silicon tip is compatible with modern IC technology; in addition, the silicon tip may be easy to sharp, so that it is more practical than other materials. It is believed that the application of silicon tip will be newly developed with the improvement of fabrication technology and other correlative technologies. |
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| Keywords: | Silicon tip Etch Micro-processing |
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