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Hot-filament CVD synthesis and application of carbon nanostructures
Authors:Soonil Lee  Seungho Choi  Kyo Won Chae  Yeonghwan Ahn  Ken Ha Koh
Affiliation:a Division of Energy Systems Research, Ajou University, Suwon 443-747, South Korea
b Production Engineering Research Lab, Samsung SDI, Suwon 443-731, South Korea
c Korea Advanced Nano Fab Center, Suwon 443-766, South Korea
Abstract:We have reported the catalyst-assisted hot-filament chemical vapor deposition (HFCVD) of various carbon nanostructures, such as carbon nanotube (CNT), nanoparticle (CNP), and nanofiber (CNF), and their application examples. In the case of CNT, vertically aligned high-density growth has been investigated in detail using in-situ optical reflectivity measurement. For CNF showing large field-emission currents, adsorbate-related emission behavior and the emission from patterned cathodes have been studied. Regarding CNP, the performances of a series of triode field emitters with CNP cathodes have been compared, and the application of CNP triode to miniature time-of-flight mass spectrometer has been discussed.
Keywords:Hot filament CVD   Carbon nanotube   Carbon nanoparticle   Carbon nanofiber   Field-electron emission   Triode field emitter
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