基于LabVIEW平台的新型二维微位移传感器设计

基于矩形谐振腔的光学等倾干涉原理，设计了一种新型的二维微位移传感器系统，该系统通过电耦合器件( CCD)技术对等倾干涉产生的周期性干涉条纹进行光电转换，然后将电信号导入信号处理系统进行采集与存储，最后由串行通信发送至计算机，在LabVIEW平台进行实时的监测。仿真实验结果显示，系统测量精度可以达到1μm~0.1μm.该系统采用矩形腔等倾干涉和F-P干涉相结合的方法，结构简单，成本低廉，且能够同时对二维微位移进行精确测量，可以应用于水利工程检测维护，大型建筑安全监测、精密加工中的实时控制等很多方面。

A Novel Two-dimensional Micro-Displacement Sensor Based on LabVIEW Platform

Based on the principle of equal inclination interference in a rectangular cavity,a novel two-dimensional micro-displacement sensor is designed. By use of Charge Coupled Device( CCD) technology and microcontroller,the signal collection, optoelectronic transform, information storage and data communication are completed. The visual display is realized by PC system and LabVIEW platform. The experimental results of fidelity simulation demonstrate that high sensitivity,up to level of 1μm~0.1μm,can be achieved. Due to its simplicity,inexpensiveness,and con-venience of operation,it is worthy of studying and spreading further in many application fields,such as monitoring the safety maintenance of key water conservancy projects and large buildings,and the real-time control of displace-ment in precision machining.