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THE EFFECT OF DIAMOND FILM NUCLEATION AND GROWTH IN DIFFERENT SUBSTRATE PRETREATMENT METHODS |
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| Authors: | ZHOU Jian WANG Jianhua YUAN Runzhang MEI Bingchu LI Qiang |
| Abstract: | The diamond film on single crystal silicon substrate in three kinds of substrate is deposited by pretreatment method using microwave plasma, the diamond film is analyzed using SEM and Raman, the reasons why substrate pretreatment affects nucleation and growth are probed. The results show that substrate pretreatment directly affects nucleation and growth of diamond film, homogeneous nucleation and growth can be formed only in suitable pretreatment method. |
| Keywords: | microwave plasma diamond film substrate pretreatment nucleation |