| 离子束辅助沉积碲化铅薄膜的AFM研究 |
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| 引用本文： | 熊玉卿,罗崇泰,王多书,马勉军. 离子束辅助沉积碲化铅薄膜的AFM研究[J]. 真空与低温, 2008, 14(1): 11-13,22 |
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| 作者姓名： | 熊玉卿 罗崇泰 王多书 马勉军 |
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| 作者单位： | 兰州物理研究所,表面工程技术国家级重点实验室,甘肃,兰州,730000 |
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| 摘 要： | 利用原子力显微镜（AFM）研究了离子束辅助沉积碲化铅（Pblle）薄膜的微观结构和表面形貌。结果表明，传统热蒸发方法制备的碲化铅薄膜呈现出明显的柱状结构，离子束轰击可以显著改变薄膜的微观结构，导致柱状结构的逐渐消失和晶粒的长大。
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| 关 键 词： | 原子力显微镜 离子束辅助沉积 碲化铅 薄膜 |
| 文章编号： | 1006-7086(2008)01-0011-03 |
| 修稿时间： | 2008-01-20 |
AFM STUDY ON LEAD TELLURIDE THIN FILMS PREPARED BY ION BEAM ASSISTED DEPOSITION |
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| XIONG Yu-qing,LUO Chong-tai,WANG Duo-shu,MA Mian-jun. AFM STUDY ON LEAD TELLURIDE THIN FILMS PREPARED BY ION BEAM ASSISTED DEPOSITION[J]. Vacuum and Cryogenics, 2008, 14(1): 11-13,22 |
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| Authors: | XIONG Yu-qing LUO Chong-tai WANG Duo-shu MA Mian-jun |
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| Affiliation: | ( National Key Lab of Surface Engineering, Lanzhou Institute of Physics, Lanzhou 730000, China ) |
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| Abstract: | The microstructure and morphology of the lead telluride optical thin films prepared by ion beam assisted deposition （IBAD） were observed by atomic force microscopy （AFM）. The results show that lead telluride thin film deposited by conventional evaporating method assumed a kind of laminated structure, and ion bombardment can change the microstructure of thin film significantly, result in the disappearance of laminated structure and growth up of crystalline grain. |
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| Keywords: | atomic force microscopy （AFM） ion beam assisted deposition （IBAD） lead telluride thin f＇dm |
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