| 微纳米加工表面和表层的完整性评价 |
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| 引用本文： | 李成贵,董申.微纳米加工表面和表层的完整性评价[J].微细加工技术,2001(4):56-60,69. |
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| 作者姓名： | 李成贵 董申 |
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| 作者单位： | 1. 北京航空航天大学自动化学院测控系,
2. 哈尔滨工业大学精密工程研究所, |
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| 摘 要： | 对近年微纳米表面和表层的完整性评价技术和检测方法作了综合性概述，并且应用现有的高精度现代化测试设备，对超精密加工的硅、锗、玻璃、硬质合金、铝等材料的几种性能进行了实验研究，证明了这些手段和评价方法的可行性。
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| 关 键 词： | 表面完整性 纳米加工 扫描探针显微镜 微细加工 |
| 文章编号： | 1003-8213(2001)04-0056-05 |
Comprehensive Assessment of Micro-nano Surface and Sub-surface Integrity |
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| LI Cheng gui ,DONG Shen.Comprehensive Assessment of Micro-nano Surface and Sub-surface Integrity[J].Microfabrication Technology,2001(4):56-60,69. |
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| Authors: | LI Cheng gui DONG Shen |
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| Affiliation: | LI Cheng gui 1,DONG Shen 2 |
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| Abstract: | Some recent assessing techniques and measuring methods of micro nano surface and sub surface integrity are comprehensively summarized. Additionally, the performances of silicon, germanium, glass, hard alloy, aluminum, machined by ultra precision cutting or grinding, are studied experimentally by means of some high precision and modern test instruments, such as SPM, interference microscopy, and micro hardness meter. The experiment results show that these assessing techniques and measuring methods are feasible. |
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| Keywords: | surface integrity nano machining SPM |
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