| 新型微波ECR-PECVD装置的研制 |
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| 引用本文： | 阴生毅,陈光华,粟亦农,张永清.新型微波ECR-PECVD装置的研制[J].真空科学与技术学报,2004,24(1):33-36. |
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| 作者姓名： | 阴生毅 陈光华 粟亦农 张永清 |
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| 作者单位： | 1. 北京工业大学材料科学与工程学院,北京,100022
2. 中科院电子所微波器件中心,北京,100080 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 介绍一台新型的ECR-PECVD装置.这一装置设计和采用了一种由单个电磁线圈和永磁体单元组合的新型磁场,使整个装置结构明显简化.为提高装置的微波转换效率,通过计算机仿真微波场在等离子体室的分布,选择和采用了一种新型的矩形耦合波导.应用这一装置分解H2稀释的SiH4气体以沉积a-Si:H薄膜,获得了2 nm/s以上的高沉积速率.
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| 关 键 词： | 电子回旋共振等离子体增强化学气相沉积 波导 磁场 永磁体 Si:H薄膜 |
| 文章编号： | 1672-7126(2004)01-0033-04 |
| 修稿时间： | 2003年6月16日 |
Newly Developed Electron Cyclotron Resonance Plasma Chemical Vapor Deposition System |
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| Yin Shengyi ,Chen Guanghua ,Su Yinong and Zhang Yongqing.Newly Developed Electron Cyclotron Resonance Plasma Chemical Vapor Deposition System[J].JOurnal of Vacuum Science and Technology,2004,24(1):33-36. |
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| Authors: | Yin Shengyi Chen Guanghua Su Yinong and Zhang Yongqing |
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| Affiliation: | Yin Shengyi 1,Chen Guanghua 1*,Su Yinong 2 and Zhang Yongqing 2 1.Department of Materials science and Engineering,Beijing University of technology,Beiging,100022,China, 2.Center for Microwave Device and Technology,The institute of electronics,Chinese academy of sciences,Beijing,100080,China |
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| Abstract: | A new microwave electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition (PECVD) system was developed.A magnetic field generalized by a magnetic coil with a permanent magnet may considerably simplify the system.In order to obtain high microwave transform efficiency,a dedicated wave guide was selected and adopted,based on computer simulating of microwave electric field.By decomposing SiH 4 in this source the deposition rates of a Si:H films can be higher than 2 nm/s. |
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| Keywords: | ECR PECVD Wave guide Magnetic field Permanent magnet a Si:H films |
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