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溶胶-凝胶法制备BaxSr1-xTiO3铁电薄膜的研究
引用本文:王静,兰艳梅,王伟,杨彩琴,刘明登. 溶胶-凝胶法制备BaxSr1-xTiO3铁电薄膜的研究[J]. 无机材料学报, 2001, 16(6): 1250-1254
作者姓名:王静  兰艳梅  王伟  杨彩琴  刘明登
作者单位:[1]河北医科大学药学院,石家庄050017 [2]广西师范大学化学系,桂林541004
摘    要:介绍了sol-gel法制备BaxSr1-xTiO3铁电薄膜的工艺参数。在溶胶中加入一定体积百分含量的干燥化学控制添加剂(DCCA)可有效的防止薄膜开裂。通过IR、XRD谱图、C-V回线、I-V曲线等测试方法比较了金属醇盐法和以部分醋酸盐代替醇盐法制备薄膜的微观结构和性能。实验结果表明,全部采用醇盐为原料制备的BST薄膜性能较好。通过两种方法制备BST薄膜性能的差异,本文提出了这两种方法的成膜机理。

关 键 词:溶胶-凝胶法 BaxSr1-xTiO3 铁电薄膜 成膜机理 钛酸锶钡
文章编号:1000-324(2001)06-1250-05
收稿时间:2000-11-29
修稿时间:2000-11-29

Study On BaxSr1-xTiO3 Ferroelectric Thin Film Prepared by Sol-Gel Methods
WANG-Jing,LAN Yan-Mei,WANG Wei,YANG Cai-Qin,LIU Ming-Deng. Study On BaxSr1-xTiO3 Ferroelectric Thin Film Prepared by Sol-Gel Methods[J]. Journal of Inorganic Materials, 2001, 16(6): 1250-1254
Authors:WANG-Jing  LAN Yan-Mei  WANG Wei  YANG Cai-Qin  LIU Ming-Deng
Affiliation:1.PharmaceuticalCollege;HebeiMedicalUniversityShijiazhuang050017;China;2.ChemicalDepart-ment;GunagxiNormalUniversityGuilin541004;China
Abstract:The preparation of BaxSr1-xTiO3(BST) ferroelectric thin films was studied. A dry chemical control additive(DCCA) was added to the sol in order to avoid producing cracks. Metal- alkoxide and partial acetate methods influencing on the quality of BST thin film were also studied. The grain size, microstructure and electric properties of the films were characterized by XRD spectra, C - V characteristic, IR spectra, I - V curve, etc. The results indicate that the quality of the material synthesised by the metal-alkoxide method is better.
Keywords:sol-gel  barium stronium titanate  ferroelectric thin-film
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