| 光学薄片用作检测微小深度敏感元件的研究 |
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| 引用本文： | 赵光兴.光学薄片用作检测微小深度敏感元件的研究[J].仪表技术与传感器,1998(3):26-27. |
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| 作者姓名： | 赵光兴 |
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| 作者单位： | 华东冶金学院自动化系 |
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| 摘 要： | 本文对光学薄片用作检测微小深度敏感元件的机理进行了研究，得到了敏感元件输出与输入间的关系式，对微精加工中离子束刻蚀深度的传感技术具有现实意义。
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| 关 键 词： | 光学薄片 微小深度 敏感元件 |
The Study of the Micro-depth Sensitive Element |
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| Zhao Guangxing East China Institute of Metallurgy,Maanshan Anhui ..The Study of the Micro-depth Sensitive Element[J].Instrument Technique and Sensor,1998(3):26-27. |
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| Authors: | Zhao Guangxing East China Institute of Metallurgy Maanshan Anhui |
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| Affiliation: | Zhao Guangxing East China Institute of Metallurgy,Maanshan Anhui 243002. |
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| Abstract: | In the paper, sensitive element's mechanism is studied and the relational expression between the output and input of the sensitive element is obtained. This will be possed of actual significance for transducer technology in micromachining. |
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| Keywords: | Optical Thin Slice Micro-Depth Sensitive Element |
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