| 使用薄膜湿敏元件的湿度控制器的设计 |
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| 引用本文： | 刘云峰 陈国平. 使用薄膜湿敏元件的湿度控制器的设计[J]. 仪表技术与传感器, 1998, 0(8): 29-31,I001 |
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| 作者姓名： | 刘云峰 陈国平 |
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| 作者单位： | 东南大学电子工程系 |
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| 摘 要： | 介绍了一种以Ｔａ２Ｏ５薄膜ＭＯＳ型湿敏元件为核心的湿度控制电路。该电路性能稳定，易于调节，应用广泛。
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| 关 键 词： | 湿度控制器 应力分布 优化设计 湿敏元件 |
Design of a Humidity Controller Using Thin Film Humidity Sensor |
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| Liu Yunfeng,Chen Guoping. Design of a Humidity Controller Using Thin Film Humidity Sensor[J]. Instrument Technique and Sensor, 1998, 0(8): 29-31,I001 |
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| Authors: | Liu Yunfeng Chen Guoping |
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| Affiliation: | Liu Yunfeng,Chen Guoping Department of Electronic Engineering,Southeast University,Nanjing 210096. |
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| Abstract: | This paper introduces a humidity control circuit using Ta_2O_5 thin film MOS humidity sensitive component .The circuit designed has the advantages of high-stability and convenience in regulation and can be used widely. |
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| Keywords: | Humidity Controller Finite Element Method Stress Distribution Optimun Deaign. |
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