| 微结构气敏传感器制造工艺的研究 |
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| 引用本文： | 王利 祁志美. 微结构气敏传感器制造工艺的研究[J]. 仪表技术与传感器, 1998, 0(3): 10-13 |
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| 作者姓名： | 王利 祁志美 |
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| 作者单位： | 中科院电子所传感技术国家重点实验室 |
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| 摘 要： | 本文主要介绍了微结构气敏传感器制造工艺中的关键技术，例如双面光刻、反应等离子刻蚀、硅的各向异性腐蚀、采用溶胶—凝胶镀膜技术制备ＷＯ３敏感薄膜。文中还给出ＷＯ３薄膜的ＸＲＤ和ＳＥＭ表面分析图。对结构和表面形貌进行了分析，并给出传感器的气敏特性曲线。最后对存在的问题进行了简单的讨论。
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| 关 键 词： | 气敏传感器 微机械技术 溶胶—凝胶 |
Research on Micromachining Technology for Micro Structure Gas Sensor(MGS) |
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| Wang Li,Qi Zhimei and Cui Dafu State Key Laboratories of Transducer Technology. Research on Micromachining Technology for Micro Structure Gas Sensor(MGS)[J]. Instrument Technique and Sensor, 1998, 0(3): 10-13 |
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| Authors: | Wang Li Qi Zhimei Cui Dafu State Key Laboratories of Transducer Technology |
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| Affiliation: | Wang Li,Qi Zhimei and Cui Dafu State Key Laboratories of Transducer Technology,Institute of Etectronics,Chinese Academy of Sciences,Beijing 100080. |
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| Abstract: | This paper mainly present the key micromachining technologies for micro structure gas sensor(MGS),such as both side aligning technology,chemical anisoptropic etching technology,reactive plasma etching technology and so on.The paper also provides XRD and SEM surface analysis of WO 3 thin film produced by the sol-gel method,the photograph of SEM for MGS and describes the gas sensitive property of MGS. Finaly,the paper discusses some problems of the technology for MGS. |
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| Keywords: | Gas Sensor Micromachining Technology Sol-gel Method. |
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