| 微机械加工技术发展概况（一） |
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| 引用本文： | 鲍敏杭. 微机械加工技术发展概况（一）[J]. 仪表技术与传感器, 1998, 0(5): 1-3 |
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| 作者姓名： | 鲍敏杭 |
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| 作者单位： | 复旦大学电子工程系传感技术国家实验室 |
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| 摘 要： | 本文总结介绍了近年来国内外微机械加工技术的新发展，并讨论了微机械技术进一步发展的要求和发展趋势。
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| 关 键 词： | 微机械技术 传感器 执行器 |
Development Survey of the Micromachining Technology |
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| Bao Minhan Decpartment of Electronic Engineering,Fudan University. State Lab.of Transducer Techuology,shanghai. Development Survey of the Micromachining Technology[J]. Instrument Technique and Sensor, 1998, 0(5): 1-3 |
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| Authors: | Bao Minhan Decpartment of Electronic Engineering Fudan University. State Lab.of Transducer Techuology shanghai |
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| Affiliation: | Bao Minhan Decpartment of Electronic Engineering,Fudan University. State Lab.of Transducer Techuology,shanghai 200233 |
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| Abstract: | The new development of the internal and external micromachining technology in the last years is presented summary in this paper. And the demands of the further developing for micromachining and the development trend are discussed. |
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| Keywords: | Micromachining Techinology transducer Actuator. |
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