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Electromechanical coupling modelling of distributed MEMS phase shifter for phased array antennas |
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| Authors: | Congsi Wang Kang Ying Haihua Li Wei Gao Lei Yin Meng Wang |
| Affiliation: | 1. Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, Xidian University, Xi’an, China;2. School of Civil and Environmental Engineering, University of New South Wales, Sydney, Australia;3. School of Civil and Environmental Engineering, University of New South Wales, Sydney, Australia;4. Xi’an Research Institute of Huawei Technologies, Xi’an, China;5. Research Institute of Shaanxi Huanghe Group Co., Ltd., Xi’an, China |
| Abstract: | MEMS phase shifter has many advantages as the ‘steering wheel’ of phased array antenna beam steering. The deformation of mechanical structures of MEMS phase shifter influenced by the complex environmental factors, which became the biggest obstacle to further enhance the performance of phased array antennas. The electromechanical coupling model between the bridge height and phase shift of the distributed MEMS phase shifter is developed. The coupling model could be used to predict the phase error and determine the bridge height tolerance for the deformed MEMS phase shifter. The simulation results of four-bit distributed MEMS phase shifter with 15 bridges illustrate the validity of coupling model and demonstrate the application potential for engineering design and test. |
| Keywords: | Active antenna phase shifter electromechanical coupling performance prediction structural tolerance |