利用频闪成像方法进行微机电系统的计量

为了实现MEMS器件的计量，一个基于频闪成像原理的MEMS动态测试平台被构建，用于在全频率、相位和电压输入范围内表征器件的全三维运动。系统利用高亮度LED和LD作为脉冲光源，有效冻结MEMS器件的面内和离面运动，能在从静止状态到1MHz很宽的频率范围内对MEMS器件进行表征，达到了纳米级分辨力。通过实验对一个微谐振器进行了三维运动测量，在扫频和扫幅两种工作模式下，配合强大的数据分析软件，给出器件运动的幅频和相频特性曲线，为分析器件的动态性能提供了可靠数据。

MEMS Measurement Using Strobed Imaging

To realize the measurement of microelectromechanical systems (MEMS) devices, a dynamic testing platform based on strobed imaging is presented, which can be used in the MEMS characterization of full 3-D motion over their full range of frequency, phase, and voltage inputs. High power LED and LD are applied in the system as pulsed light sources to freeze the in-plane and out-of-plane motions of MEMS devices. It can be characterized from their static state up to frequencies of one megahertz with nanometer scale resolution. Experiments are made on a micro-resonator to show its 3-D motion. In the operating modes of sweep frequency and sweep amplitude, combined with a powerful data analyzing software, amplitude-frequency and phase-frequency performance curves are obtained to provide reliable data to analyze the dynamic behaviors of MEMS devices.