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STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS
作者姓名:B. W. Wang and H. Shen Guangzhou Institute of Energy Conversion  The Chinese Academy of Sciences  Guangzhou  China
作者单位:B. W. Wang and H. Shen Guangzhou Institute of Energy Conversion,The Chinese Academy of Sciences,Guangzhou 510070,China
基金项目:中国科学院"百人计划" 
摘    要:1. IntroductionSolar selective thiIl solid fil1us are the key part for solar heat collect'ors. But ll1ostfactories still produced solar absorptive filn1s by traditional tecIl11ology sucl1 as pai1ltillga1ld electrocl1eluical process that nlust result in po…


Guangzhou Institute of Energy Conversion,The Chinese Academy of Sciences,Guangzhou 510070,China
B. W. Wang and H. Shen Guangzhou Institute of Energy Conversion,The Chinese Academy of Sciences,Guangzhou ,China.STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS[J].Acta Metallurgica Sinica(English Letters),2002,15(2):203-206.
Authors:BWWang  HShen
Affiliation:Guangzhou Institute of Energy Conversion,The Chinese Academy of Sciences,Guangzhou 510070,China
Abstract:Ni-Cr System solar selective thin solid films were prepared by d.c. magnetron reactive sputtering under the atmosphere of O2 and N2. Ni-Cr alloy was chosen as target material and copper sheets as substrate. Using SEAL Spectrophotometer and Talystep to analyze the relations between the selective characteristic and the structure, the formation and the thickness of the thin films. The aim is to obtain good solar selective thin films with high absorptance and low emittance, which is applied to flat plate solar heat collectors.
Keywords:solar selective thin film  magnetron reactive sputtering  absorptance  emittance
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