用于10-6N~10-5N微力测量的柔性铰链机构设计

在基于静电场原理的微纳力值测量系统中,力值的传递与转化机构起着至关重要的作用。选择平行四边形柔性铰链机构作为其弹性元件,以实现10-6N量级的力值测量。分析了柔性铰链的数学模型,研究了其静态与动态刚度;根据系统要求确定了柔性铰链的目标刚度,并采用有限元方法对其进行优化设计和模态分析;分析了加工精度对铰链刚度的影响。将该铰链用于微力测量系统中,通过实验给出了刚度测试结果和力值测量结果,实验表明,该平行四边形柔性铰链满足微力测量系统对10-6N量级的力值测量要求。

Design of Flexure Hinge Mechanism for 10-6N~10-5N Micro Force Measurement

In a micro-nano force measurement system based on the principle of static electric field, the mechanism used for force transmission and transformation plays a vital role. The parallelogram flexible hinge mechanism is used as elastic element, in order to realize the measurement of force on the scale of 10-6N. The mathematical model of the flexible hinge is abstract to study the static and dynamic stiffness. The theory stiffness is determined according to the system requirement. The finite element method is used for the optimization design and modal analysis. The influence to the hinge stiffness of the machining accuracy is analyzed. The stiffness test and force value measurement results are given by experiments. Results show that the parallelogram flexible hinge can be used in the force measurement system on the scale of 10-6N.