| 二氧化硅平面光波导器件的研究进展 |
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| 引用本文： | 杨斌,尹小杰,李绍洋,吴远大. 二氧化硅平面光波导器件的研究进展[J]. 半导体光电, 2021, 42(2): 151-157, 167. DOI: 10.16818/j.issn1001-5868.2021.02.001 |
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| 作者姓名： | 杨斌 尹小杰 李绍洋 吴远大 |
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| 作者单位： | 科技部高技术中心材料处,北京100044;中国科学院半导体研究所集成光电子学国家重点联合实验室,北京100083;中国科学院半导体研究所集成光电子学国家重点联合实验室,北京100083;中国科学院大学材料科学与光电技术学院,北京100049;中国科学院半导体研究所集成光电子学国家重点联合实验室,北京100083;中国科学院大学材料科学与光电技术学院,北京100049;中国科学院大学材料与光电研究中心,北京100049 |
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| 基金项目： | 国家重点研发计划项目(2016YFB0402500).＊通信作者:吴远大E-mail:wuyuanda@semi.ac.cn |
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| 摘 要： | 二氧化硅平面光波导(PLC)器件以其低损耗、高工艺容差,以及与CMOS工艺兼容和与单模光纤模场匹配良好等优点,在光通信、光互连和集成光学中得到了广泛的应用.文章综述了二氧化硅平面光波导器件及其应用的进展,重点针对分束器、阵列波导光栅、可调光衰减器及其集成器件的最新研究进行了介绍,对未来发展趋势进行了展望.
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| 关 键 词： | 有源光子集成波导器件 无源光子集成波导器件 集成光学 光通信系统 |
| 收稿时间： | 2020-12-21 |
Recent Progresses about Silica-based Planar Lightwave Circuit Devices |
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| YANG Bin,YIN Xiaojie,LI Shaoyang,WU Yuanda. Recent Progresses about Silica-based Planar Lightwave Circuit Devices[J]. Semiconductor Optoelectronics, 2021, 42(2): 151-157, 167. DOI: 10.16818/j.issn1001-5868.2021.02.001 |
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| Authors: | YANG Bin YIN Xiaojie LI Shaoyang WU Yuanda |
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| Affiliation: | High-tech Research and Development Center, Ministry of Science and Technol., Beijing 100044, CHN;State Key Lab.of Integrated Optoelectronics, Institute of Semiconductors of Chinese Academy of Sciences, Beijing 100083, CHN;State Key Lab.of Integrated Optoelectronics, Institute of Semiconductors of Chinese Academy of Sciences, Beijing 100083, CHN;College of Materials Science and Opto-Electronic Technol., University of Chinese Academy of Sciences, Beijing 100049, CHN; State Key Lab. of Integrated Optoelectronics, Institute of Semiconductors of Chinese Academy of Sciences, Beijing 100083, CHN; College of Materials Science and Opto-Electronic Technol., University of Chinese Academy of Sciences, Beijing 100049, CHN; Center of Materials Science and Optoelectronics Engin., University of Chinese Academy of Sciences, Beijing 100049, CHN |
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| Abstract: | Owing to their advantages such as low loss, high process tolerance, manufacturing process compatible with CMOS processes and good mode field matching with single-mode optical fiber, silica-based planar light-wave circuits (PLC) have been widely used in optical communication, optical interconnections and integrated optics. In this paper, the recent progresses of the silica-based PLC devices and their applications are reviewed. Silica-based PLC devices including beam splitters, array waveguide gratings, variable optical attenuator and their integration devices are described, and future development trends are proposed. |
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| Keywords: | active photonic integrated waveguide devices passive photonic integrated waveguide devices integrated optics optical communication system |
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