| Research on the Passivation Function of Si＿3N＿4 Film to YBCO Superconducting Film |
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| 作者姓名： | Zhang Yutian Jin Bo AND Qian Pingkai |
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| 作者单位： | Zhang Yutian;Jin Bo AND Qian Pingkai(Department of Applied Science and Technology，Beijing University of Posts and Telecommunications Beijing 100088，P. R. China |
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| 摘 要： | ＲｅｓｅａｒｃｈｏｎｔｈｅＰａｓｓｉｖａｔｉｏｎＦｕｎｃｔｉｏｎｏｆＳｉ＿３Ｎ＿４ＦｉｌｍｔｏＹＢＣＯＳｕｐｅｒｃｏｎｄｕｃｔｉｎｇＦｉｌｍＺｈａｎｇＹｕｔｉａｎ；ＪｉｎＢｏＡＮＤＱｉａｎＰｉｎｇｋａｉ（ＤｅｐａｒｔｍｅｎｔｏｆＡｐｐｌｉｅｄＳｃｉｅ...
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Research on the Passivation Function of Si_3N_4 Film to YBCO Superconducting Film |
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| Zhang Yutian,Jin Bo AND Qian Pingkai.Research on the Passivation Function of Si_3N_4 Film to YBCO Superconducting Film[J].The Journal of China Universities of Posts and Telecommunications,1995(1). |
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| Authors: | Zhang Yutian Jin Bo AND Qian Pingkai |
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| Abstract: | We made the high critical temperature superconducting film YBa_2Cu_3O_(7-8). (YBCO) with wonderful prop-erties by magnetic sputtering, and deposited Si_3N_4 protected covering on YBCO by microwave plasma Chemical Va-par Deposition (CVD) method and completed a moisture test to study this structure. The analysis of X-ray diffract-ing energy spectral of this structure had been made. The results showed that the Si_3N_4 film made no obviously influ-ence on YBCO and the Si_3N_4 film had better passivation to water obviously. |
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| Keywords: | superconducting films passivation moisture experiment |
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