氧化锌铝(ZAO)靶材的制备及性能研究

采用冷等静压成型(CIP)、低真空烧结和热等静压(HIP)烧结技术制备ZAO靶材,采用排水法、SEM、XRD、光谱发射法(ICPOES)分析了2种烧结方法制备的ZAO靶材的密度、结晶状态和组织成分.结果表明,ZAO细粉经压力造粒后,CIP成型压坯相对密度可达75%以上,该压坯经低真空高温烧结,相对密度达到95%,而采用HIP低温烧结的靶材可达到98%以上,靶材结晶完整,组织成分均匀.

Study on Preparation of ZAO Target and Its Property

In order to improving the density properties of the ZAO targets,the ZAO powders are compacted by cold isostatic pressing(CIP) firstly,and then sintered by rough vacuum sintering technique and hot isostatic pressing(HIP).The density of ZAO targets is tested by Archimedes means,the fracture is observed with scanning electron microscopy(SEM) and the composition is analyzed with inductively coupled plasma optics emission spectrum(ICPOES),the new phase of targets is analyzed by X-ray diffraction pattern(XRD).The results show that the relative density of the green compacts was up to 75%.The relative density of ZAO targets sintered by rough vacuum sintering technique is 95%.The relative density of ZAO targets sintered by HIP exceeds 98% ,which grain structure and components distribution are integral and uniform.