RbN3分解时间对原子气室吸收光谱的影响

为了解决原子气室制备过程中碱金属原子定量填充难、稳定性差等问题，首先采用微电子机械系统（Micro-Electro-Mechanical System， MEMS）技术，结合碱金属叠氮化物的光分解方法，通过深硅刻蚀、RbN₃溶液定量填充、两次阳极键合、紫外光辐照等工艺成功制备出不同RbN₃分解时间的原子气室，然后采用自行搭建的吸收光谱测试装置对不同RbN₃分解时间的原子气室进行测试，研究不同RbN₃分解时间对原子气室内Rb原子吸收峰强度、半高宽和频移的影响。实验结合理论分析发现：RbN₃分解时间为3.5 h时，Rb原子吸收峰强度最大，能够满足高质量原子气室制备的要求，为高质量原子气室的制备提供了重要技术借鉴，为推动基于MEMS原子气室的芯片化计量测试传感技术的发展奠定基础。

Effect of RbN3 decomposition time on absorption spectra of alkali atom vapor cells

In order to solve the problems of difficult quantitative filling and poor stability of alkali atoms during the preparation of atom vapor cells, alkali atom vapor cells with different RbN₃ decomposition time were prepared by micro?electro?mechanical system (MEMS) technology combined with photodecomposition of alkali azide, specifically by deep silicon etching, quantitative filling of RbN₃ solution, double anode bonding and ultraviolet irradiation. The atom vapor cells with different RbN₃ decomposition time were tested with a self?built absorption spectrum testing device. The influences of different RbN₃ decomposition time on the Rb vapor absorption peak intensity, half?height width and frequency shift in the atom vapor cells were studied. Though experiments and theoretical analysis, it is found that when the RbN₃ decomposition time is 3.5 h, the Rb atom absorption peak intensity is the largest, which can meet the requirements of high quality atom vapor cell preparation. It provides important technical reference for the preparation of high quality atom vapor cells, and lays the foundation for promoting the development of chip based measurement and sensing technology based on MEMS atom vapor cell.