纳米级薄膜厚度的精确测量

对于纳米级多层膜来说,膜厚的精确测量至关重要。本文针对X射线衍射测量薄膜厚度的方法,对所能够获得的测量精度进行了研究。结果表明,无论是单层膜还是多层膜,实现样品台的精密装调都是获得膜厚精确测量结果的前提条件;而在实现了精密装调的情况下,由于多层膜具有相对较窄的衍射峰,因此能够提取出更为精确的峰位数据,与单层膜相比,能够得到更精确的膜厚;经过合理地选择衍射峰,能够获得优于0.01nm的多层膜周期厚度测量精度。

Accurate Determination of Thicknesses for Nanometer Thin Films

Accurate determination of film thicknesses is critical for nanometer ultra-thin films.In this paper,we carry out the research on the accuracy of the method to determine film thicknesses by using x-ray diffractometer.The results show that the fine adjustment procedure of the sample stage is the precondition to acquire accurate film thickness for both single layer and multilayer thin films.When the fine adjustment procedure is performed,period thicknesses of multilayer thin films are more accurate than those of single layer thin films,by virtue of their narrow shape of diffraction peaks and the consequently accurate peak positions.By choosing diffraction peaks appropriately,the measuring accuracy of better than 0.01 nm for period thicknesses of multilayer thin films can be achieved.