| 电感耦合等离子质谱法测定石英砂中十四种痕量杂质元素 |
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| 引用本文： | 苗雪原,孙红香,张丽峰,黄叶彩,周文梅,程尚栩.电感耦合等离子质谱法测定石英砂中十四种痕量杂质元素[J].硅谷,2014(12):103-105. |
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| 作者姓名： | 苗雪原 孙红香 张丽峰 黄叶彩 周文梅 程尚栩 |
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| 作者单位： | 江苏省连云港市东海质量技术监督局;江苏省东海县环境监测站;国家硅材料深加工产品质量监督检验中心; |
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| 基金项目： | 国家标准委员会标准制定项目(20110051-T-469) |
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| 摘 要： | 文章根据不同石英砂的矿相、加工工艺,建立了密闭消解和微波消解等样品处理方法,利用电感耦合等离子体质谱仪（ICP-MS）对石英砂中痕量杂质元素进行检测。采用Sc为内标补偿基体效应和仪器漂移。检测结果表明,密闭酸溶法与微波消解法无显著性差异（P≥0.05）；ICP-MS检测石英砂中痕量杂质元素准确度和精确度高,检测线性范围宽,检出限低,分析快速。测定结果的相对标准偏差（RS D）0.2%～5.0%,检出限为0.009～0.093 ng/ml。
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| 关 键 词： | 石英砂 痕量杂质元素 电感耦合等离子体质谱 |
ICP-MS Determination of 14 Trace Impurities Elements of Quartz Sand |
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| Affiliation: | MIAO Xue-yuan, SUN Hong-xiang, ZHANG Li-feng, HUANG Ye-cai, ZHOU Wen-mei, CHENG Shang-xu( 1. Quality and Technical Supervision Bureau of DongHai County, Lianyungang City, Jiangsu Province, Lianyungang 222300： 2. Environment Monitor Station of DongHai County, Jiangsu Province ,Lianyungang 222300;3. Nationa Quality Supervision and Inspection Center of Silicon Material Processing Products, Lianyungang 222300) |
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| Abstract: | According to the different of quartz sand,processing technology. The article established the airtight digestion and microwave digestion sample treatment method.The method used Icp-Ms for detecting trace impurity elements in quartz sand, using Sc as internal standard, compensating matrix effect and the instrument drift. Test results showed that there were no significant difference between the closed acid soluble method and microwave digestion method （P≥0.05）. This method had high accuracy and definition , wide linearity range, low detection limit, fast analysis. The RSD was in the range of 0.2%～5.0%, the detection limits for in the range of 0.009～0.092ng/ml. |
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| Keywords: | quartz sand trace element impurities ICP-MS |
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