Thermally Induced Viscous Flow of Borophosphosilicate-Glass Thin Films on Stepped Surfaces,Part 1: A Review of Quantitative Studies on Furnace and Rapid Thermal Annealing |
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Authors: | Vasilev V. Y. |
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Affiliation: | (1) Institute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences, Novosibirsk, Russia |
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