| 中国关键电子气体现状及未来 |
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| 引用本文： | 孙福楠. 中国关键电子气体现状及未来[J]. 低温与特气, 2017, 0(6): 1-4. DOI: 10.3969/j.issn.1007-7804.2017.06.001 |
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| 作者姓名： | 孙福楠 |
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| 摘 要： | 对国内某些关键重点的特气现状进行了回顾和描述,指出了现阶段我国超纯特气存在的诸多问题,展望未来我国高纯气体的发展方向。
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The Present Situation and Future of Key Electronic Gases in China |
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| Abstract: | The status of domestic special gas some key points are reviewed and described, and points out the problems at the present stage of pure gas in our country,the prospect of the future development direction of China's high pure gas. |
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