| 对国内硅烷生产的几点看法 |
| |
| 引用本文： | 余京松,沃银花,张金波. 对国内硅烷生产的几点看法[J]. 低温与特气, 2009, 27(6): 7-11. DOI: 10.3969/j.issn.1007-7804.2009.06.002 |
| |
| 作者姓名： | 余京松 沃银花 张金波 |
| |
| 作者单位： | 1. 浙江大学,半导体材料研究所,浙江,杭州,310027
2. 杭州新世纪混合气体有限公司,浙江,杭州,311107 |
| |
| 摘 要： | 阐述了国内硅烷的生产现状、所采用的技术路线以及在引进国外技术方面所面临的问题。对硅化镁法生产硅烷的工艺过程中比较突出的几个问题如氨的回收,杂质水、氢和碳氢化合物等谈了自己的看法和处理意见。
|
| 关 键 词： | 硅烷 技术路线 硅化镁 多晶硅 非晶硅太阳能电池 |
Some Opinions About Domestic Silane Production |
| |
| YU Jing-song,WO Yin-hua,ZHANG Jin-bo. Some Opinions About Domestic Silane Production[J]. Low Temperature and Specialty Gases, 2009, 27(6): 7-11. DOI: 10.3969/j.issn.1007-7804.2009.06.002 |
| |
| Authors: | YU Jing-song WO Yin-hua ZHANG Jin-bo |
| |
| Affiliation: | YU Jing-song, WO Yin-hua, ZHANG Jin-bo ( 1. Semiconductor Materials Research Institute, Zhejiang University, Hangzhou 310027, China; 2. Hangzhou New Century Mixed Gased Co. ,Ltd. , Hangzhou 311107, China ) |
| |
| Abstract: | Current status of silane production in China is reviewed in this work. We introduce the technological routes of silane production. The problems in adopting foreign technologies are analyzed. For the production of silane from magnesium silicide, key techniques such as the recycling of ammonia and the control of impurities （e.g., water, hydrogen and hydrocarbon） are discussed. Suggestions on how to deal with the problems in the production of silane from magnesium silicide are made. |
| |
| Keywords: | silane technological routes magnesium silicide polycrystalline silicon amorphous silicon film solar cells |
| 本文献已被 维普 万方数据 等数据库收录！ |
|
