| 激光预处理硬质合金衬底沉积金刚石薄膜研究 |
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| 引用本文： | 李成明,王建明,徐重,吕反修,王建军,周岳亮,吕惠宾.激光预处理硬质合金衬底沉积金刚石薄膜研究[J].材料热处理学报,1996(4). |
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| 作者姓名： | 李成明 王建明 徐重 吕反修 王建军 周岳亮 吕惠宾 |
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| 作者单位： | 太原工业大学，北京科技大学，中国科学院物理研究所 |
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| 摘 要： | 研究了准分子激光辐照对ＷＣ－６ｗｔ％Ｃｏ（ＹＧ６）硬质合金工具衬底沉积金刚石膜的影响。证实准分子激光辐照可产生钴选择性蒸发和表面粗糙化；从而有效地降低表面钴含量，消除钴对金刚石膜沉积的有害影响。硬质合金ＹＧ６工具衬底沉积金刚石薄膜工艺参数范围较窄，采用阶段沉积法可以得到质量良好，附着力强的金刚石薄膜。
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| 关 键 词： | 硬质合金，激光预处理，选择性蒸发，金刚石薄膜 |
An Investigation of Diamond Films Deposition on Hard Alloy by Excimer Laser Pretreatment |
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| Li Chengming, Wang Jianming, Xu Zhong.An Investigation of Diamond Films Deposition on Hard Alloy by Excimer Laser Pretreatment[J].Transactions of Materials and Heat Treatment,1996(4). |
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| Authors: | Li Chengming Wang Jianming Xu Zhong |
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| Abstract: | Effect of excimer laser irradiation on CVD of diamond film on WC-600wt% Co hard metal substrate was studied. Co depletion via selective evaporation and surface roughened by the energetic laser beam was confirmed and was proved to be effective on the improvement of the quality and adhesion of the diamond film. It was found that the process parameters for diamond film deposition were much narrower than on other substrate. A novel method of step deposition was proposed for obtaining good quality and adhesive diamond films on YG6 hard metal substrate. |
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| Keywords: | hard alloy laser pre-treatment selective evaporation diamond films deposition |
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