| MEMS领域中形状记忆合金薄膜的研究与进展 |
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| 引用本文： | 章磊,谢超英,吴建生.MEMS领域中形状记忆合金薄膜的研究与进展[J].材料导报,2006,20(2):109-113. |
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| 作者姓名： | 章磊 谢超英 吴建生 |
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| 作者单位： | 上海交通大学材料科学与工程学院教育部高温材料及测试重点实验室,上海,200030 |
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| 基金项目： | 上海市科技发展基金，中南大学校科研和教改项目 |
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| 摘 要： | 总结了近年来微机电系统(MEMS)领域中,ti-Ni形状记忆合金(SMA)薄膜的制备与微加工工艺、形状记忆性能、加工性能、防腐耐磨性能及力学性能的研究进展,由此提出了MEMS领域中,SMA薄膜的使用要求和研究方向.
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| 关 键 词： | 微机电系统 形状记忆合金薄膜 力学性能 |
Progress in Research on Shape Memory Alloy Films in MEMS Field |
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| ZHANG Lei,XIE Chaoying,WU Jiansheng.Progress in Research on Shape Memory Alloy Films in MEMS Field[J].Materials Review,2006,20(2):109-113. |
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| Authors: | ZHANG Lei XIE Chaoying WU Jiansheng |
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| Affiliation: | Key Laboratory of Education Ministry for High Temperature Materials and Tests, School of Materials Science and Engineering, Shanghai Jiaotong University, Shanghai 200030 |
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| Abstract: | In the field of micro-electro-mechanical systems (MEMS), the recent progresses in the fabricating and micro-machining process of the Ti-Ni shape memory alloy film (SMA) are summarized. At the same time,the researches on shape memory effect, machining property, antiseptic property, wear resistant property and mechanical property of SMA thin films are introduced in this paper. Based on these, the requirements for application and investigating directions of SMA thin films in MEMS field are presented. |
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| Keywords: | MEMS shape memory alloy film mechanical property |
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