激光 ICF 聚变靶丸轮廓测量系统标定方法

针对激光惯性约束聚变靶丸轮廓高精度测量系统的溯源标定问题,提出一种基于激光差动共焦测量原理的标定溯源方法。该方法基于激光差动共焦靶丸测量系统轴向响应曲线过零点精确对应测量系统焦点的性质,首先利用激光差动共焦靶丸测量系统测量经中国计量科学研究院计量检定的标准椭圆块的圆度,其次通过比对测量值和标准椭圆块圆度计量值,得出该系统测量传递系数为1.03,最后通过多次检定验证测量的方法,完成系统的高精度标定。实验结果显示,利用标定完成的系统进行激光聚变靶金属球比对测量,其标准差为37 nm,该标定方法的测量重复性为17 nm,其为靶丸表面轮廓的高精度测量奠定了坚实基础。

Calibration method of profile measurement system for laser ICF capsule

Aiming at the problem of traceability and calibration of the laser inertial confinement fusion capsule profile high-precision measurement system, proposes a calibration and traceability method based on the principle of laser differential confocal measurement. Based on the property that the zero-crossing point of the axial response curve of the laser differential confocal capsule measurement system accurately corresponds to the focus point of the measurement system, the method firstly uses the laser differential confocal capsule measurement system to measure the roundness of the standard elliptical blocks calibrated by National Institute of Metrology, China. Secondly, through comparing the roundness measurement value with the roundness metrological value of the standard elliptical blocks, the measurement transfer coefficient of the system is obtained, which is 1. 03. Finally, through multiple verification measurement methods, the high-precision calibration of the system is completed. The experiment results show that using the calibrated system to conduct the comparison measurement of the laser fusion target metal capsule, the standard deviation is 37 nm; the measurement repeatability of this calibration method is 17 nm, which lays a solid foundation for the high-precision measurement of the surface profile of the capsule.