Electron emission from Pb(Zr0.65Ti0.35)O3 film cathode by pulse electric field

Pulse electric field induced electron emission from the Pb(Zr_0.65Ti_0.35)O₃ ferroelectric films has been investigated as a function of the film thickness from 0.2 to 4.0 μm and the upper electrode diameter from 200 to 1100 μm. The electron emission charge from the 3.0 μm film was several nC per pulse, which was comparable to that of the bulk ferroelectrics. However, the local dielectric breakdown occurred in the films below 1.0 μm without the electron emission, which was confirmed by the optical microscopy observation after the emission tests. As the upper electrode size decreased and the film thickness increased, electrons were more easily emitted without breakdown.