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退火损伤对Er注入GaAs和Yb注入InP发光的影响
引用本文:曹望和,张联苏. 退火损伤对Er注入GaAs和Yb注入InP发光的影响[J]. 半导体学报, 1991, 12(2): 80-86
作者姓名:曹望和  张联苏
作者单位:中国科学院长春物理研究所 长春130021(曹望和),中国科学院长春物理研究所 长春130021(张联苏)
摘    要:本文报道了CaAs∶Er、InP∶Yb发光样品的二次离子质谱、X-射线双晶衍射测量结果及其与Er离子的表面成份的关系.分析讨论了退火损伤对GaAs∶Er和InP∶Yb发光的影响以及Er~(3+)复合体发光中心模型.

关 键 词:稀土离子 注入 GaAs InP 光致发光

Effect of Annealing Damages on Luminescences of Er,Yb-Implanted GaAs and InP
Cao Wanghe/Changchun Institute of Physics,Academia SinicaChang Liansu/Changchun Institute of Physics,Academia Sinica. Effect of Annealing Damages on Luminescences of Er,Yb-Implanted GaAs and InP[J]. Chinese Journal of Semiconductors, 1991, 12(2): 80-86
Authors:Cao Wanghe/Changchun Institute of Physics  Academia SinicaChang Liansu/Changchun Institute of Physics  Academia Sinica
Abstract:The photoluminescences of Er~+ or Yb~+-implanted GaAs and InP after annealing is repo-rted. The surface distribution of Er ions in GaAs: Er annealed samples is analysed by secon-dary ion mass spectroscopy (SIMS), and the rocking curves of the related luminescent samplesare measured by X-ray double crystal diffraction for GaAs: Er, InP:Er and InP:Yb. The ef-fects of the annealing damages on the luminescences of GaAs: Er and InP:Yb are investigated,and the luminescent center model of Er~(3+) complex is discussed.
Keywords:Rare earth ion  GaAs  InP  Photoluminescence  Luminescent center
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