| 硅十字梁单块力传感器 |
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| 引用本文： | 王言,王毕南,晋琦,鲍敏杭.硅十字梁单块力传感器[J].半导体学报,1990,11(5):375-379. |
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| 作者姓名： | 王言 王毕南 晋琦 鲍敏杭 |
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| 作者单位： | 复旦大学电子工程系 上海
(王言，王毕南，晋琦)，复旦大学电子工程系 上海(鲍敏杭) |
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| 摘 要： | 本文介绍一种用硅材料制成的十字梁力传感器,它的各主要结构部分是通过微加工技术在同一硅片上得到的。具有灵敏度高、温漂小,成本低、一致性好等优点。本文对器件进行了结构分析、应力计算,得到了各结构参数对器件灵敏度的影响,并在理论分析的指导下制作了高灵敏度的力传感器样品,最高灵敏度可达340mV/10g,适用于小量程范围力的测量。器件还具有过载保护结构。
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| 关 键 词： | 硅 传感器 力传感器 |
Silicon Force Sensor with Cross Beams |
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| Wang Yan/.Silicon Force Sensor with Cross Beams[J].Chinese Journal of Semiconductors,1990,11(5):375-379. |
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| Authors: | Wang Yan/ |
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| Affiliation: | Wang Yan/Department of Electrical Engineering,Fudan Uniuersity,Shanghai
Wang Bi'nan/Department of Electrical Engineering,Fudan Uniuersity,Shanghai
Jing Qi/Department of Electrical Engineering,Fudan Uniuersity,Shanghai
Bao Minhang/Department of Electrical Engineering,Fudan Uniuersity,Shanghai |
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| Abstract: | An analysis of sensitivity is presented for a silicon force sensor with cross beams.Forcesensors with high sensitivity,small drift to tempreture and low cost can be fabricated by usingthis kind of structure.The sensors for four different ranges are fabricated under the guide ofthe analysis.The highest sensitivity of the sensois is approximately 340 mv/10g. It is suitablefor the measement of weak force, and it also has a special structure to resist over range force. |
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| Keywords: | silicon transducer force sensor |
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