| 粉末溅射平面薄膜型SnO2／CeO2酒敏传感器 |
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| 引用本文： | 李建明,吕红浪.粉末溅射平面薄膜型SnO2／CeO2酒敏传感器[J].电子学报,1996,24(5):114-116. |
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| 作者姓名： | 李建明 吕红浪 |
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| 作者单位： | 山东工业大学数理系，济南大学机电系 |
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| 摘 要： | 介绍粉末溅射研制的ＳｎＯ２／ＣｅＯ２酒敏薄膜的性能与膜厚、温度和掺杂量等关系的研究结果，并根据此结果对平面薄膜型敏感传感器的工艺和结构进行了设计；介绍了所研制器件的一些性能，并对有关问题进行了讨论。
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| 关 键 词： | 粉末溅射 薄膜 传感器 酒敏 二氧化锡 二氧化铈 |
Powder Sputtering Plane Thin-Film SnO_2/CeO_2 Alcohol Sensor |
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| Li Jianming, Liu Wenli, Qiu Nanyuan.Powder Sputtering Plane Thin-Film SnO_2/CeO_2 Alcohol Sensor[J].Acta Electronica Sinica,1996,24(5):114-116. |
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| Authors: | Li Jianming Liu Wenli Qiu Nanyuan |
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| Abstract: | SnO2/CeO2 gas sensing thin films for alcohol were deposited by powder sputtering,whose properties releting to film thickness,temperature and dose are given. For these results above,the technology and structure of plane thin film gas sensors for alcohol were designed. Some properties of these sensors are introduced and the releted problems are discussed. |
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| Keywords: | Powder sputtering Thin film Sensor Gas sensing for alcohol |
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