New Bi-metallic Single Source Precursors for the Deposition of Thin Films of Semiconductor Ceramics

Stable binary single source precursors (SSP) for the deposition of thin films of ceramic semiconductors of composition SnO·GeO were synthesized by close circuit chemical vapour deposition (CCCVD) method. Elemental analysis and spectroscopic techniques were used to characterize the precursors. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) were employed to characterize the thin films. Resistivity measurements were conducted to show that the films are of semiconducting nature.