电子级多晶硅生产技术探讨

介绍了目前国内外电子级多晶硅生产技术的发展状况,重点说明了改良西门子法电子级多晶生产技术原理及其工艺流程,主要包括:氢气制备及纯化、氯化氢合成、低压氯化(三氯氢硅合成)、低温氢化(四氯化硅转化)、精馏、CVD还原、尾气回收和后处理等工序。结合电子级多晶硅生产技术的成功工程应用实践,介绍了电子级多晶硅项目的技术特点。

Research on Electronic-grade Polysilicon Production Technology

The current development of electronic - grade polysilicon production technology at home and abroad was introduced, focusing on the principle and process of modified siemens electronic - grade polyerystalline production technology, including hydrogen preparation and purification, synthesis of HC1, low - pressure chloride （synthesis of trichlorosilane）, low - temperature hydrogenation （conversion of silicon tetraehloride ）, distillation, CVD reduction, exhaust gas recycling and reprocessing process. Combined with the success practical application of the electronic - grade polysilicon production technology, technical features and advantages of the electronic - grade polysilicon project in Huanghe Hydropower Development Company were introduced.