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| 基于环形微热板的ZnO微气体传感器设计 | |
| 引用本文： | 李超,谭秋林,刘文怡.基于环形微热板的ZnO微气体传感器设计[J].传感器与微系统,2014,33(11):89-91. |
| 作者姓名： | 李超 谭秋林 刘文怡 |
| 作者单位： | 1. 中北大学电子测试技术重点实验室,山西太原,030051 2. 中北大学电子测试技术重点实验室,山西太原030051;中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 3. 中北大学仪器科学与动态测试教育部重点实验室,山西太原,030051 |
| 基金项目： | 国家自然科学基金资助项目 |
| 摘 要： | 提出一种新型的设有环形结构微热板的硅基ZnO微气体传感器。利用ANSYS软件,将环形电极结构与传统的蛇形结构进行温度分布的模拟仿真,发现该结构能供给传感器更高的温度且中心温度分布均匀,进而解决了现有传感器功耗大的缺点。通过对RF磁控溅射ZnO薄膜的工艺摸索,得出了适宜作气敏薄膜的制备参数。该传感器在250℃下对（200-1000）×10-6CH4气体有很好的响应。 |
| 关 键 词： | 环形微热板 气体传感器 ZnO薄膜 RF磁控溅射 |
Design of ZnO micro gas sensor based on ring shape micro-hotplate |
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| LI Chao,TAN Qiu-lin,LIU Wen-yi.Design of ZnO micro gas sensor based on ring shape micro-hotplate[J].Transducer and Microsystem Technology,2014,33(11):89-91. | |
| Authors: | LI Chao TAN Qiu-lin LIU Wen-yi |
| Affiliation: | LI Chao, TAN Qiu-lin, LIU Wen-yi ( 1. Science and Technology on Electronic Test ＆ Measurement Laboratory, North University of China, Taiyuan 030051, China; 2. Key Laboratory of Instrumentation Science ＆ Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China) |
| Abstract: | A novel silicon-based ZnO micro gas sensor with ring shape structure micro-hotplate is proposed. Temperature distribution simulation on ring shape electrode structure and traditional serpentine structure is conducted using ANSYS software,it is found that the structure can provide sensor with higher working temperature and temperature distribution in center is uniform, thus solve disadvantage of large power consumption. Preparation parameter which is suitable for gas sensitive film is obtained through technology exploration of ZnO thin film with RF magnetron sputtering. The designed sensor can offer fairly good response for methane at range （200 - 1000 ） × 10 ^-6 at 250 ℃. |
| Keywords: | ring shape micro-hotplate gas sensor ZnO thin film RF magnetron sputtering |
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