Using Thermal Spray and Laser Micromachining to Fabricate Sensors |
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Authors: | Jon P Longtin Eduardo Mari Yang Tan and Sanjay Sampath |
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Affiliation: | (1) Center for Thermal Spray Research, Department of Mechanical Engineering, Stony Brook University, Stony Brook, NY 11794-2300, USA;(2) Center for Thermal Spray Research, Department of Materials Science, Stony Brook University, Stony Brook, NY 11794-2350, USA |
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Abstract: | The use of thermal spray to fabricate sensors directly onto engineering components is an emerging technology. The capabilities
for sensor fabrication are considerably enhanced with the use of laser micromachining, in which feature sizes as small as
15-20 μm can be achieved. Such feature sizes are required for a variety of sensors, including strain and heat flux sensors,
thermopiles and microheaters. Ultrafast lasers—lasers with pulse durations ≲1 ps—are particularly well suited for the multimaterial/multilayer
processing required to fabricate sensors from materials deposited using thermal spray. In this work, the key issues associated
with laser micromachining of thermal spray coatings for sensor applications are presented. Both resistive strain gages and
microheaters are discussed in detail as representative sensor designs that require the fine feature and linewidth capability
that laser micromachining provides, including details of their fabrication and practical design restrictions. This article
summarizes with recommendations for future work. |
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