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Extreme Two‐Phase Cooling from Laser‐Etched Diamond and Conformal,Template‐Fabricated Microporous Copper
Authors:James W. Palko  Hyoungsoon Lee  Chi Zhang  Tom J. Dusseault  Tanmoy Maitra  Yoonjin Won  Damena D. Agonafer  Jess Moss  Farzad Houshmand  Guoguang Rong  Joshua D. Wilbur  Derrick Rockosi  Ihor Mykyta  Dan Resler  David Altman  Mehdi Asheghi  Juan G. Santiago  Kenneth E. Goodson
Affiliation:1. Department of Mechanical Engineering, Stanford University, Stanford, CA, 94305, USA;2. Department of Mechanical Engineering, University of California Merced, Merced, CA, 95340, USA;3. School of Mechanical Engineering, Chung‐Ang University, Seoul, South Korea;4. Department of Mechanical and Aerospace Engineering, University of California Irvine, Irvine, CA, USA;5. Department of Mechanical Engineering and Materials Science, Washington University, St. Louis, MO, USA;6. Electronics and Communication Engineering Department, Suzhou Vocational Institute of Industrial Technology, Suzhou, China;7. Advanced Technology Programs, Raytheon Integrated Defense Systems, Sudbury, MA, USA
Abstract:This paper reports the first integration of laser‐etched polycrystalline diamond microchannels with template‐fabricated microporous copper for extreme convective boiling in a composite heat sink for power electronics and energy conversion. Diamond offers the highest thermal conductivity near room temperature, and enables aggressive heat spreading along triangular channel walls with 1:1 aspect ratio. Conformally coated porous copper with thickness 25 µm and 5 µm pore size optimizes fluid and heat transport for convective boiling within the diamond channels. Data reported here include 1280 W cm?2 of heat removal from 0.7 cm2 surface area with temperature rise beyond fluid saturation less than 21 K, corresponding to 6.3 × 105 W m?2 K?1. This heat sink has the potential to dissipate much larger localized heat loads with small temperature nonuniformity (5 kW cm?2 over 200 µm × 200 µm with <3 K temperature difference). A microfluidic manifold assures uniform distribution of liquid over the heat sink surface with negligible pumping power requirements (e.g., <1.4 × 10?4 of the thermal power dissipated). This breakthrough integration of functional materials and the resulting experimental data set a very high bar for microfluidic heat removal.
Keywords:boiling  diamond  laser ablation  porous copper  templated electrodeposition
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