| 新型K-800A高真空油扩散泵的研制 |
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| 引用本文： | 徐玉江,王莉,许艳巧.新型K-800A高真空油扩散泵的研制[J].真空,2005,42(6):16-18. |
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| 作者姓名： | 徐玉江 王莉 许艳巧 |
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| 作者单位： | 兰州真空设备有限责任公司,甘肃,兰州,730050 |
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| 摘 要： | 介绍了新研制的高真空油扩散泵在拓宽抽气速率范围、提高临界前级压力、降低返油率方面的创新设计。给出了新研制的K-800A高真空油扩散泵各项技术指标的实测结果。
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| 关 键 词： | 油扩散泵 抽气性能 研制 返油率 |
| 文章编号： | 1002-0322（2005）06-0016-03 |
| 收稿时间： | 2005-06-03 |
| 修稿时间： | 2005-06-03 |
Development of new-type K-800A high vacuum oil diffusion pump |
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| XU Yu-jiang,WANG Li,XU Yan-qiao.Development of new-type K-800A high vacuum oil diffusion pump[J].Vacuum,2005,42(6):16-18. |
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| Authors: | XU Yu-jiang WANG Li XU Yan-qiao |
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| Affiliation: | Lanzhou Vacuum Equipment Co. LTD, Lanzhou 730050, China |
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| Abstract: | Introduces the newly developed K-800A HV oil diffusion pump for its design of broadened range of pumping speed, increased critical backing pressure and reduced backstreaming rate. Reveals the actual measurements of its main performance indices. |
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| Keywords: | oil diffusion pump pumping capability development backstreaming rate |
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