A simple photolithography method for microfluidic device fabrication using sunlight as UV source |
| |
Authors: | Jingyun Ma Lei Jiang Xiaoyan Pan Huipeng Ma Bingcheng Lin Jianhua Qin |
| |
Affiliation: | 1.Dalian Institute of Chemical Physics,Chinese Academy of Sciences,Dalian,China |
| |
Abstract: | A straightforward method for microfluidic devices fabrication using sunlight as the ultraviolet (UV) source is established
in this work. This method is based on photolithography, but obviates the need for specialized UV exposure facility. Substrates
coated with photoresist were placed directly under sun in a perpendicular direction to the sunlight for exposure. Exposure
conditions were optimized for patterning features with different kinds of photoresist, photoresist of different thicknesses
and dimensions. Exposure time can be adjusted to obtain designed features on a mask with good lateral structure according
to the energy measured by UV meter (with a constant intensity of UV in sunlight). Masters produced under optimum exposure
conditions were used for the fabrication of several microfluidic devices with different materials, structures, or functions.
Resultant devices were shown eminently suitable for microfluidic applications such as electrophoretic separation, multiple
gradient generator, and pneumatic valve-based cell culture. This photolithographic method is simple, low cost, easy to operate,
and environmental friendly. Especially, the masters can be obtained in parallel simultaneously, which is suitable for chip
fabrication for mass production. It is also more attractive for the laboratories, in which the support for photolithographic
facility is not available. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|