微梁无耗散弛豫动态过程分析及仿真

为探讨微机电系统中梁结构无耗散弛豫动力学特性,基于Euler-Bernoulli梁方程,引入两端绞紧梁边界条件,推导梁挠度无耗散弛豫理论表达式,并给出梁挠度振幅分布以及弛豫周期内挠度动态Maple算例。对微梁无耗散弛豫过程进行有限元仿真,结果表明,弛豫仿真周期与理论计算相符,梁挠度振幅仿真分布与算例有差异,大挠度弛豫振幅与初始挠度仿真比值与理论相差较大。

Analysis and simulation of micro-beam non-dissipative relaxation dynamic process

In order to explore characteristics of micro-beam non-dissipative relaxation dynamics of MEMS,the beam non-dissipative deflection relaxation expression was educed based on Euler-Bernoulli equation with boundary conditions of two hinged ends.The deflection amplitude distribution and deflection dynamic process in a relaxation period were calculated by Maple.The finite element simulation data of micro-beam non-dissipative relaxation indicated that relaxation period was agreement with theoretical calculation,deflection amplitude distribution was differed from calculation example used Maple,the ratio of relaxation amplitude to initial deflection was quite a difference compared with theory result when micro-beam has large deflection.