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外腔半导体激光器在微振动测量中的应用
引用本文:江鹏飞,谢福增. 外腔半导体激光器在微振动测量中的应用[J]. 中北大学学报(自然科学版), 2007, 28(1): 46-48
作者姓名:江鹏飞  谢福增
作者单位:中国科学院,半导体研究所,北京,100083;中国科学院,半导体研究所,北京,100083
摘    要:基于外腔半导体激光器(ECSL)良好的相干特性,采用Littrow自准直外腔方式进行了实验,得到了良好的线宽和稳定的功率,验证了外腔半导体激光器运用于纳米级光学测量和微振动测量的可行性;提出了解决外界扰动的反馈光路方案,能够有效滤除环境振动和噪声干扰,提高了振动测量系统在现实环境中的适应能力。

关 键 词:微振动测量  反馈控制  外腔半导体激光器  窄线宽
文章编号:1673-3193(2007)01-0046-03
修稿时间:2006-06-15

Applications of External-Cavity Semiconductor Laser in Microvibration Measurement
JIANG Peng-fei,XIE Fu-zeng. Applications of External-Cavity Semiconductor Laser in Microvibration Measurement[J]. Journal of North University of China, 2007, 28(1): 46-48
Authors:JIANG Peng-fei  XIE Fu-zeng
Abstract:Based on excellent coherence of the External-Cavity Semiconductor Laser(ECSL),the experiment of favorable spectral line width and steady power were got by using autocollimation external-cavity of Littrow.It is proved that ECSL can be used in the measurement of nanometrology and microvibration.A method of feedback light-path to remove the environment vibratility and noise interference was presented,which can improve the adaptability of the measurement system in the environment.
Keywords:microvibration measurement  closed feedback control  external-cavity semiconductor laser  narrow bandwidth
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