| MEMS变发射率真空热控器件研究进展 |
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| 引用本文： | 任大海,田景峰,尤政.MEMS变发射率真空热控器件研究进展[J].真空科学与技术学报,2009,29(4). |
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| 作者姓名： | 任大海 田景峰 尤政 |
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| 作者单位： | 清华大学,精密仪器与机械学系,精密测试技术及仪器国家重点实验室,北京,100084 |
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| 摘 要： | 变发射率热控技术是空间环境下的重要热控手段.微小卫星质量轻,尺寸小,功耗低及其真空环境工作等特点对热控系统提出了新的要求,相应热控器件应具有小质量、大发射率调节比、关闭状态漏热小、响应快等特点.MEMS技术由于其设计灵活性高、功耗低及器件体积、重量方面的优势,可很好地满足这类器件的要求.本文重点对基于MEMS技术的微百页窗,微热开关,微静电换热器等技术的研究进展、关键技术与适用范围进行了归纳总结,将基于MEMS技术的变发射率器件和基于材料研究的电致变色和热致变色这两种技术进行了对比分析,指出了MEMS技术在微小卫星变发射率热制器件中的发展趋势和潜力.
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| 关 键 词： | 微机电系统 真空 热控 变发射率 百页窗 |
Latest Progress in Variable Emissivity Thermal Control of Micro-Electro-Mechanical-System Devices |
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| Ren Dahai,Tian Jingfeng,You Zheng.Latest Progress in Variable Emissivity Thermal Control of Micro-Electro-Mechanical-System Devices[J].JOurnal of Vacuum Science and Technology,2009,29(4). |
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| Authors: | Ren Dahai Tian Jingfeng You Zheng |
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| Abstract: | The latest progresses in design,fabrication and applications of the variable emissivity thermal control,microelectro-mechanical system(MEMS)devices used in space environment,are tentatively reviewed.The advantages of the variable emissivity thermal control and MEMS in fabrication of micro-satellites are discussed.Discussions are focused on key design and applications of the MEMS-based micro-shutters,micro-thermal switches and micro-electric static radiators.The advantages of the MEMS thermal control technology based on new material,electrochromic and thermochromic technology were studied.The trend and the potentials of MEMS technology in fabricating the variable emissivity thermal controllers used in micro-satellite are also summarized in a thought provoking way. |
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| Keywords: | MEMS Vacuum Thermal control Variable emissivity Shutter |
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