一种绝对式容栅测量新技术

在综合分析、比较现有容栅测量技术的基础上,介绍了一种绝对式容栅测量技术.这种技术克服了传统相对式容栅测量系统中存在的缺陷,利用两级耦合多精度合成实现测量位置的绝对编码,实现了高精度、大量程测量.首先介绍了用于高精度测量的容栅测量系统构成,讨论了绝对式测量的工作原理.给出的系统检测电路解决了传统鉴相型检测电路中滤波效应导致信号精确性受到损坏以及需要较长稳定时间的问题.

An Absolute Measurement Technique Using Capacitive Displacement Sensor

Aiming at the drawbacks of the relative measurement, an absolute measurement technique using capacitive displacement sensor is presented in this paper. This technique is based on two coupling levels and multi-precision to achieve the absolute coding, which realizes the measurement of high accuracy and long-range. This paper gives a brief introduction of the structure of capacitive measurement system. And the principle of the system is also analyzed. Phase discriminator solves the problems that the accuracy of signals is decreased by the filter and long settling time is required.