| 微夹钳研究的进展与展望 |
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| 引用本文： | 张培玉,武国英,郝一龙,李志军. 微夹钳研究的进展与展望[J]. 光学精密工程, 2000, 8(3): 292-296 |
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| 作者姓名： | 张培玉 武国英 郝一龙 李志军 |
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| 作者单位： | 北京大学微电子所，北京 100871 |
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| 摘 要： | 微夹钳技术是微机械技术的重要内容之一.本文首先论述了微夹钳的应用背景,回顾了微夹钳技术研究的历史及现状;对目前国内外所研究的微夹钳进行了分类,并对其结构工艺与工作原理进行了分析;最后,对微夹钳技术的发展进行了展望.
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| 关 键 词： | 微夹钳 微机电系统 综述 |
| 文章编号： | 1004-924X(2000)03-0292-05 |
| 收稿时间： | 1999-12-05 |
| 修稿时间： | 1999-12-05 |
Development of microgripper technology |
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| ZHANG Pei-yu,WU GUO-ying,HAO Yi-long,LI Zhi-jun. Development of microgripper technology[J]. Optics and Precision Engineering, 2000, 8(3): 292-296 |
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| Authors: | ZHANG Pei-yu WU GUO-ying HAO Yi-long LI Zhi-jun |
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| Affiliation: | Microelectronics Institute, Peking University, Beijing 100871, China |
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| Abstract: | Microgripper technique was one of important parts in micromachine techniques. Firstly, the application background was recounted in the paper. The development and actualities of research in microgripper technique were reviewed. Secondly, microgrippers were classified. The structural arts and work principle were analyzed. Finally, the development of microgripper techniques was prospected. |
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| Keywords: | microgripper MEMS review |
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