| 微电子工业生产废水处理及回收利用 |
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| 引用本文： | 胡伟林. 微电子工业生产废水处理及回收利用[J]. 工业水处理, 2001, 21(12): 40-41 |
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| 作者姓名： | 胡伟林 |
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| 作者单位： | 华越微电子有限公司, |
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| 摘 要： | 阐述了微电子工业芯片制造而产生的含氟废水、硅片研磨废水以及纯水处理混床再生所产生的高浓度酸碱废水的处理方法，特别对含氟废水的处理进行了大胆的浓度，取得了明显的成效。对处理后的合格废水回收用作工艺设备及动力设备的冷却水，产生了良好的经济效益和社会效益。
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| 关 键 词： | 含氟废水 研磨废水 酸碱废水 回收利用 微电子工业 废水处理 |
| 文章编号： | 1005-829X(2001)12-0040-02 |
| 修稿时间： | 2001-06-05 |
Treatment and reclamation utilization of the wastewater in microelectronic industry |
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| HU Wei lin. Treatment and reclamation utilization of the wastewater in microelectronic industry[J]. Industrial Water Treatment, 2001, 21(12): 40-41 |
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| Authors: | HU Wei lin |
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| Abstract: | The treatment process of the wastewater that is produced in the microeletronic industry chip manufacture field is expounded,including fluoride wastewater and silica grind wastewater and the high acid and caustic concentration wastewater coming from the mixed bed regeneration in the D.I system,and specially do the brave experiment to the wastewater containing F -. An obvious effect has been achieved. The treated wastewater has been used as cooling water of the process equipment and power equipment,and it obviously benefits the economy and society. |
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| Keywords: | fluoride wastewater silica grind wastewater acid and caustic water reclamation and utilization |
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