Information depth and spatial resolution in BSE microtomography in SEM |
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| Affiliation: | 1. Optical Institute, Technical University of Berlin, Sekr.P 1-1, Hardenbergstr 36A, D-10623 Berlin, Germany;2. Physical Department, Moscow State University, 119899 Moscow, Russian Federation;1. The French Aerospace Lab, FR-31055, France;2. CNES, 18 Avenue Édouard Belin, 31400 Toulouse, France;1. Department of Materials Design and Innovation, University at Buffalo – The State University of New York, Buffalo, NY 14260, USA;2. Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611, USA;3. Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA 16802, USA;4. Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 37695, USA;1. Unité de pathologie moléculaire du globule rouge, laboratoire de biochimie et de biologie moléculaire, hôpital Édouard-Herriot, hospices civils et université Claude-Bernard Lyon 1, 5, place d’Arsonval, 69003 Lyon, France;2. Laboratoire de génétique moléculaire, AREDEMAG, hôpital d’enfants de la Timone, Assistance publique des Hôpitaux de Marseille (AP–HM), 264, rue Saint-Pierre, 13385 Marseille, France;3. Institut d’hématologie et d’oncologie pédiatrique, université Lyon 1, centre de référence des thalassémies, 1, place Joseph-Renault, 69008 Lyon, France;4. UMR_S 910, faculté de médecine secteur Timone, Aix-Marseille université, 27, boulevard Jean-Moulin, 13385 Marseille cedex 05, France;5. EA 647, centre de recherche et d’innovation sur le sport (CRIS), université de Lyon, campus universitaire de La-Doua, bâtiment R.-Dubois, 27-29, boulevard du 11-Novembre-1918, 69622 Villeurbanne cedex, France;6. Université Claude-Bernard Lyon 1, boulevard du 11-Novembre-1918, 69622 Villeurbanne, France;1. Electron Microscope Unit, University of the Western Cape, Private Bag X17, Bellville 7535, South Africa;2. Department of Physics and Astronomy, University of the Western Cape, Private Bag X17, Bellville 7535, South Africa |
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| Abstract: | Various methods of visualizing subsurface structures using the scanning electron microscope (SEM) in the backscattered electrons (BSE) mode are analyzed. The problems of image contrast and “in-depth” resolution of layered microstructures are discussed. The potentials of BSE microtomography, i.e. layer-by-layer formation of images of undersurface inhomogeneities are demonstrated by experiment. |
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