Scratch and wear resistance of hydrophobic CeO2-x coatings synthesized by reactive magnetron sputtering |
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Affiliation: | 1. School of Materials Science & Engineering, Tianjin University, Tianjin 300350, China;2. Tianjin Key Laboratory of Advanced Joining Technology, Tianjin University, Tianjin 300072, China;3. Key Laboratory of Advanced Ceramics and Machining Technology of Ministry of Education, Tianjin University, Tianjin 300072, China |
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Abstract: | CeO2-x coatings were deposited under variable oxygen flow ratios (%fO2) onto Si substrates by reactive magnetron sputtering. Nanoindentation testing revealed an increase in the hardness, elastic modulus, H/E and H3/E2 ratio with increasing oxygen flow ratio, which in turn increased the adhesion and tribological performance of the coatings. Scratch testing yielded the highest critical load (LC2 = 28.8 N) and CPRS = 103 for the coating deposited with the highest oxygen flow ratio (57 %fO2). Cracking events during scratch testing were initiated by tensile forces behind the scratch stylus, which led to the formation of semi-circular ring cracks. As the normal load increased, transverse cracks emerged extending outwards from the scratch track towards the edge causing the exposure of substrate. Beyond LC2, severe spallation of the CeO2-x coatings led to coating failure. Furthermore, the specific wear rates of the CeO2-x coatings were determined to be within the ~10?15 m3/Nm range influenced by three-body abrasive wear. In-depth analyses from scratch and wear data indicates that these coatings possess good adhesion and durability. |
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Keywords: | Reactive magnetron sputtering Cerium oxide coating Scratch toughness Tribological performance Durability |
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