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Thermal expansion coefficient tailoring of LAS glass-ceramic for anodic bondable low temperature co-fired ceramic application
Affiliation:1. College of Material Science and Engineering, Guilin University of Electronic Technology, Guilin 541004, PR China;2. Guangxi Key Laboratory of Information Materials, Guilin University of Electronic Technology, Guilin 541004, PR China;3. School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin 541004, PR China;1. State Key Laboratory of Silicate Materials for Architectures (SMART), Wuhan University of Technology, Wuhan 430070, China;2. State Key Laboratory of Advanced Technology for Float Glass, CNBM Bengbu Design & Research Institute for Glass Industry Co., Ltd., Bengbu, China;1. Ceramic Department, Materials and Energy Research Center (MERC), P. O. Box: 31787-316, Alborz, Iran;2. Otto-Schott-Institut für Material Forschung, Jena University, 07743 Jena, Germany;3. Battery and Sensor Group, Materials and Energy Research Center (MERC), P. O. Box: 31787-316, Alborz, Iran;4. Department of Materials Science and Nano-Engineering, Sabanci University, Orhanli, Tuzla, 34956 Istanbul, Turkey;5. Key Laboratory of Inorganic Functional Material and Device, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China;1. School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu, China;2. State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu, China;3. National Engineering Research Center of Electromagnetic Radiation Control Materials, Chengdu, China
Abstract:The Li–Al–Si glass-ceramics were prepared by conventional glass-ceramic fabrication method. The influences of Na2O content on the sintering property, microstructure, and coefficient of thermal expansion were investigated. The results show that the coefficient of thermal expansion of LAS glass-ceramics can be tailored to match that of silicon by the addition of Na2O content. Na2O has a remarkable influence on the crystallinity of Li–Al–Si glass-ceramic. The coefficient of thermal expansion of Li–Al–Si glass-ceramic is thus tunable between that of glass phase and crystal phase. The Si–O bond length change in stretch vibration modes introduced by Na2O also contributes to the variation of coefficient of thermal expansion of the Li–Al–Si glass-ceramics. The coefficient of thermal expansion of the Li–Al–Si glass-ceramic with 1.5 wt% Na2O addition is about +3.34 ppm/°C at 350 °C and shows a good compatibility to that of silicon in a wide temperature range, which makes it a promising candidate for anodic bondable low temperature co-fired ceramic substrate applications.
Keywords:Anodic bonding  Thermal expansion  Spodumene  Glass-ceramic
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