有明显金刚石结构特征的类金刚石薄膜的制备方法

通过分析比较低压化学气相合成金刚石薄膜的大量试验方法及规律，认为非平衡条件下金刚石微晶形核篚具备三个宏观条件：１）馈入足够高的能量；２）衬底表面应形成大的能量梯度；３）气氛中应含超平衡浓度的刻蚀剂，以有效的抑制非金刚石碳相的生长。

On Direct Proof of Existence of Diamond Micro-Crystallines in Diamond-Like Carbon Film

In 1992 Sbimada[7], after etching, proved for the first time that diamond-containing microcrystallincs do exist in diamond-like carbon film. In this paper we report that we can do without etching and prove directly that such microcrystallincs do exist.To give such a direct proof has proved vel'y difficult for many researchers. The authors' long cxperience in CVD (chemical vapor deposition) research has led them to come to formulate the following three macroscopic conditions for diamond microcrystallinc nucleation and growth under non-equilibrium conditions:(1) Sufficient energy should be furnished.(2) Big energy gradient should exist at surface of substrate.(3) Concentration of etchant in mixtures should ba higher than needed for equilibrium.Keeping in mind these three necessary conditions, we improve traditional CVD method in three respects: (l) We place substrate on anode and increase rf power density to 0.45w/ cmZ' Pa and negative bias to-500V; (2) We keep anode at room temperature through water cooling; (3) We increase argon content in reaction mixtures to over 80%. Face--centred diamond diffraction rings and 1 333cm-1diamond peak are characterized by TEM and Raman spectroscopy respectively.